Quantum 930Y High Purity Manifold Valve

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Parker Veriflo 930Y High Purity Manifold Valve, three port, air operated, NC, 316L SS body, 1/4" face seal female (swivel) x 1/4" face seal female (swivel) x 1/4" face seal female (swivel), PCTFE seat, 4.06" x 2.66" gland-to-gland
  • Product Description
  • Dimension Drawing
The Parker Veriflo 930Y is a high purity diaphragm valve manifold, engineered to meet the specific requirements of semiconductor OEM tool manufacturers. The 930Y is designed for space savings and with fewer welds, and low internal volume components; making this valve manifold ideal for process control and purge systems.

  • Ideal for valve manifold boxes
  • High cycle life
  • Internally threadless and springless
  • Fully functional under vacuum conditions