945Y High Purity Manifold Valve

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Parker Veriflo 945Y High Purity Manifold Valve, three port, air operated, double acting, 316L SS body, 1/4" face seal female (swivel) x 1/4" face seal female (swivel) x 1/4" face seal female (swivel), upstream purge, PCTFE seat, 4.06" x 2.66" gland-to-gland
  • Product Description
  • Dimension Drawing
The Parker Veriflo 945Y is a custom built high purity diaphragm valve manifold, engineered to meet the specific requirements of semiconductor OEM tool manufacturers. Space savings and fewer welds make the 945Y valve manifold ideal for process control and purge systems.

  • Ideal for valve manifold boxes
  • Fully field serviceable seat can be replaced without special tools
  • Internally threadless and springless
  • Fully functional under all vacuum conditions