GasShield Modular Mount Restrictors

GSMR-20-1-500SCCM-N2-30PSI-2-S
$309.75 / EA
In Stock
  • Product Type: Modular Mount Restrictor
  • Manufacturers: Mott Corporation
  • Product Family: GSMR Series
  • Body Material: 316 Stainless Steel
  • Pressure: Up To 120 PSIG
  • Flow Tolerance: ±7% of Rated Flow At Rated Pressure (±2% Available Upon Request)
  • Standard Downstream Flow Rates: 50 SLPM
  • Temperature: Up To 450°C (Inert Gases)
Mott GasShield® Modular Mount Restrictors, C-Seal, 1.125 in. sq., spool piece (flow passage equivalent to 1/4" tubing), 316L SS VAR, 500 SCCM, N2@30psi, 2 ports, restrictor plug side port.
QTY
  • Product Description
Porous metal restrictors for 1.125" surface mount applications.

Mott Corporation supports the 1.125" and 1.5" high-flow C-Seal configuration of integrated gas systems with a full line of porous metal flow restrictors. These products use the same sealing specifications as described in SEMI PR 3.1 and provide the same high-quality flow restriction presently available in our 5140 series restrictors with traditional face seal design. All GSMR restrictor products are assembled and tested in a class 100 clean room environment. For W-Seal configurations, consult factory for specifications.