Quantum 945 High Purity Low Internal Volume Diaphragm Valve

945AOPLPNCSFSMM2.3
/ Each
Available to Order
Parker Veriflo 945 High Purity, Low Internal Volume Diaphragm Valve, two port, air operated, normally closed, 1/4 face seal male (fixed) x 1/4 face seal male (fixed), 316L VAR stainless steel body, no upstream purge port, no downstream purge port, PCTFE seat, Elgiloy or equivalent diaphragm, 0.25 Cv, 2.3 " gland-to-gland option
  • Product Description
  • Dimension Drawing
The Parker Veriflo 945 high purity diaphragm valve is designed for semiconductor process control. This valve has all of the features and benefits of the 944 Series valve with reduced internal volume and body size. The 945 diaphragm valve has machined on tube stubs, which allows for improved dimensional control.

  • Fully field serviceable seat can be replaced without special tools
  • Interchangeable actuators without breaking into wetted area
  • Internally threadless and springless
  • Fully functional under all vacuum conditions