Valin Centura and Centura Ultima Gas Box Pneumatic Manifold Replacement
- Product Type: Retrofit Kit
- Manufacturer: Valin
- Product Family: Centura
Valin Centura and Centura Ultima Gas Box Pneumatic Manifold Replacement, Valin has engineered a drop-in pneumatic manifold replacement that is a perfect solution for your obsolete Gas Box Pneumatic Manifolds on your aging fleet of Centura and Centura Ultima process tools. The AC-150-2444 pneumatic manifold comes as a complete kit for ease of installation. Valin's AC-150-2444 pneumatic manifold replaces Centura and Centura Ultima pneumatic manifold part 0190-09487 and 0190-02046 for both the lower and upper gas boxes without NF3 interlocks.
Click here to request POE (Product on Evaluation) order.
Download Pneumatic Manifold Retrofit Kits 0010-20052 0010-70297 and 0190-09487 Flyer (PDF)
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Product Description
Centura and Centura Ultima Gas Box Pneumatic Manifold Replacement for 0190-09487 & 0190-02046 - Upgrade Benefits:
- Replace entire Manifold in minutes
- Current Manifold difficult to source
- Replace individual valves in less than 5 minutes
- Reduce Tool Downtime
- Eliminate CDA leaks
- Improve performance with larger Cv (.3) and higher flowrate (250 -300 l/min) for faster valve actuation
- Reduce potential of wafer scrap due to leakage
- Valves rated to 150 Million Cycles
- The power consumption of each coil is 0.55w and a switching time of 8 ms
- Drop in place solution (no holes to tap)
- Units tested and fab approved
Clean, Simple Design
Valin AC-150-2444 Pneumatic Manifold
Valin's AC-150-2444 pneumatic manifold replaces Centura and Centura Ultima pneumatic manifold part 0190-09487 & 0190-02046 for both the lower and upper gas box without NF3 interlocks.
For Applications with RTP (Rapid Thermal Processing) Chambers:
Adding the AC-150-2466 NF3 Interlock Kit to Valin's AC-150-2444 Standard Gas Box Manifold can replace the Centura manifold part 0190-09487 (Rev A). This manifold enables the NF3 interlock circuits in the controls.
Click here to request POE (Product on Evaluation) order.
Have questions?
Contact our team of semiconductor technical specialists at (855) 737-4716, or email our team at manifold@valin.com to learn more.
