GSMR-20-1-1000SCCM-N2-30PSI-3-S Mott GasShield Modular Mount Restrictors
- Product Type: Modular Mount Restrictor
- Product Family: GSMR Series
- Standard Downstream Flow Rates: 50 SLPM
- Temperature Rating: Up To 450°C (Inert Gases)
Mott Corporation supports the 1.125" and 1.5" high-flow C-Seal configuration of integrated gas systems with a full line of porous metal flow restrictors. These products use the same sealing specifications as described in SEMI PR 3.1 and provide the same high-quality flow restriction presently available in our 5140 series restrictors with traditional face seal design. All GSMR restrictor products are assembled and tested in a class 100 clean room environment. For W-Seal configurations, consult factory for specifications.