GSMR-20-1-20SCCM-NF3-15PSI-3-C Mott Corporation GasShield Modular Mount Restrictors
- Product Type: Modular Mount Restrictor
- Flow Tolerance: ±7% of Rated Flow At Rated Pressure (±2% Available Upon Request)
- Pressure: Up To 120 PSIG
- Standard Downstream Flow Rates: 50 SLPM
- Temperature Rating: Up To 450°C (Inert Gases)
Mott GasShield® Modular Mount Restrictors, C-Seal, 1.125 in. sq., spool piece (flow passage equivalent to 1/4" tubing), 316L SS VAR, 20 SCCM, NF3@15PSI, 3 port, restrictor plug center port.
Mott Corporation supports the 1.125" and 1.5" high-flow C-Seal configuration of integrated gas systems with a full line of porous metal flow restrictors. These products use the same sealing specifications as described in SEMI PR 3.1 and provide the same high-quality flow restriction presently available in our 5140 series restrictors with traditional face seal design. All GSMR restrictor products are assembled and tested in a class 100 clean room environment. For W-Seal configurations, consult factory for specifications.