SQ140E High Purity Low Pressure Regulator (Point-of-Use)

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Parker Veriflo SQ140E High Purity Low Pressure Regulator (point-of-use), 3 ports, 316L SS body, 250 psig max. inlet press., 50 psig max. outlet press., tied Hastelloy C-22 diaphragm, 30" Hg-0-60 psig outlet gauge, no inlet gauge, PCTFE seat, 3P port config: 1/4" face seal female (swivel) all ports
  • Product Description
  • Dimension Drawing
The Parker Veriflo SQ140E was created in response to the need for high performance, high purity, point-of-use pressure regulators for modern semiconductor processing. Precise control of gas pressure at or near the tool served, makes possible stable process control by a mass flow controller.

  • Hastelloy C-22 poppet and diaphragm standard
  • Tied diaphragm for added safety
  • Capable of operating at a wide range of flows from 0.1 cc/min to more than 100 liter/min
  • Compatible with the high flow of corrosive gases
  • No wetted spring
  • No threads exposed to the wetted area