SQ420E1002PFS8FFEV Parker Veriflo SQ420E High Purity Low Pressure Regulator (Point-of-Use)

SQ420E1002PFS8FFEV
Request for Quote
  • Product Type: Low Pressure Regulator
  • Max. Outlet Pressure: 100 PSIG
  • Port 2 Size: 1/2 in.
  • Port 2 Type: Face Seal Female (Swivel)
  • Port Type: Face Seal Female (Swivel)
  • Refine Search: High Purity
  • Port Size: 1/2 in.

Parker Veriflo SQ420E High Purity Low Pressure Regulator (point-of-use), 2 ports, 316L SS body, 250 psig max. inlet press., 100 psig max. outlet press., tied Hastelloy C-22 diaphragm, no outlet gauge, no inlet gauge, PCTFE seat, 5Ra surface finish, 2P port config: 1/2" face seal female (swivel) all ports

Browse All Parker Hannifin Products

QTY

Contact Our Process Control Experts

Contact our experts to answer questions or help you with your application needs.

Services

  • Distribution of components services
  • On-site inventory management
  • Factory Automation Services
  • Product expediting
  • Product obsolescence notifications and replacements
  • Kitting and packaging
  • Custom labeling

Product Description

The Parker Veriflo SQ420E Series is a high performance, high purity, point-of-use pressure regulator for modern semiconductor processing. Precise control of the gas discharge pressure at or near the tool served makes possible stable process control by a mass flow controller.

  • Tied diaphragm for added safety
  • Capable of operating at a wide range of flows from 0.5 cc/min to more than 800 liter/min
  • Compatible with the high flow of corrosive gases
  • No wetted spring
  • No threads exposed to the wetted area

Dimension Drawing