SQ420E High Purity Low Pressure Regulator (Point-of-Use)

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Parker Veriflo SQ420E High Purity Low Pressure Regulator (point-of-use), 2 ports, 316L SS body, 250 psig max. inlet press., 100 psig max. outlet press., tied Hastelloy C-22 diaphragm, no outlet gauge, no inlet gauge, PCTFE seat, 2P port config: 1/2" face seal male (swivel) x 1/2" face seal female (swivel)
  • Product Description
  • Dimension Drawing
The Parker Veriflo SQ420E Series is a high performance, high purity, point-of-use pressure regulator for modern semiconductor processing. Precise control of the gas discharge pressure at or near the tool served makes possible stable process control by a mass flow controller.

  • Tied diaphragm for added safety
  • Capable of operating at a wide range of flows from 0.5 cc/min to more than 800 liter/min
  • Compatible with the high flow of corrosive gases
  • No wetted spring
  • No threads exposed to the wetted area