- Product Description
- Dimension Drawing
The Parker Veriflo SQ420E Series is a high performance, high purity, point-of-use pressure regulator for modern semiconductor processing. Precise control of the gas discharge pressure at or near the tool served makes possible stable process control by a mass flow controller.
- Tied diaphragm for added safety
- Capable of operating at a wide range of flows from 0.5 cc/min to more than 800 liter/min
- Compatible with the high flow of corrosive gases
- No wetted spring
- No threads exposed to the wetted area