SQ60 High Purity Low Pressure Regulator (Point-of-Use)

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Parker Veriflo SQ60 High Purity Low Pressure Regulator (point-of-use), 2 ports, 316L SS body, 250 psig max. inlet press., 100 psig max. outlet press., tied Hastelloy C-22 diaphragm, no outlet gauge, no inlet gauge, PCTFE seat, 2P port config: 1/4" face seal female (swivel) all ports
  • Product Description
  • Dimension Drawing
The Parker Veriflo SQ60 is a springless, threadless high purity, point-of-use regulator designed for process gas cabinets for gas companies, equipment manufacturers and end users. The SQ60 high purity pressure regulator provides precise control of the process gas pressure at or near the tool up to 5 slpm. The result is a stable flow and pressure to the mass flow controller.

  • Tied diaphragm for added safety
  • Capable of operating at a range of flows from 0.1 cc/min to 5 slpm
  • Metal-to-metal, diaphragm-to-body seal assures high leak integrity
  • No wetted spring
  • No threads exposed to the wetted area