SQHP1003PXFSMIM Parker Veriflo SQHP High Purity High Performance Regulator (Point-of-Use)

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  • Product Type: High Performance Regulator
  • Max. Outlet Pressure: 100 PSIG
  • Port 2 Size: 1/4 in.
  • Port 2 Type: Internal Face Seal Female
  • Port 3 Size: 1/4 in.
  • Port 3 Type: Face Seal Male (Swivel)
  • Port Type: Face Seal Male (Swivel)
  • Refine Search: High Purity
  • Port Size: 1/4 in.

Parker Veriflo SQHP High Purity High Performance Regulator (point-of-use), 3 ports, 316L SS body, 3500 psig max. inlet press., 100 psig max. outlet press., tied Hastelloy C-22 diaphragm, no outlet gauge, no inlet gauge, PCTFE seat, 3P port config: 1/4" face seal male (swivel) x 1/4" internal face seal female x 1/4" face seal male (swivel)

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Product Description

The Parker Veriflo SQHP is a springless, threadless high performance, high purity point-of-use regulator designed for high purity semiconductor applications. The SQ60 provides precise control of the process gas pressure at or near the tool for inlet pressures of up to 3500 psig.

  • Tied diaphragm for added safety
  • Handles inlet pressures up to 3500 psig
  • Metal-to-metal, diaphragm-to-body seal assures high leak integrity
  • No high pressure seals to atmosphere

Dimension Drawing