- Product Description
- Dimension Drawing
The Parker Veriflo SM955 1-1/2" high purity high flow diaphragm valve is designed specifically for modular surface mount systems used in semiconductor manufacturing tools. This valve is available in both standard and high flow Cv values to meet specific flow requirements. The SM955 valve is available in either manual or air-operated designs; and features an internally threadless and springless design, and field serviceable seat.
- SEMI modular interface design
- Choice of standard and high flow Cv values
- 100% Helium leak tested
- Standard 5 Ra surface finish
- Internally threadless and springless design